Overhead Hoist Transfer (OHT)System

Elevated, Rail-Guided Automated Material Handling for Advanced Manufacturing
Mirle’s proprietary Overhead Hoist Transport (OHT) is an elevated material handling system designed to transport FOUPs between load/unload ports of various process tools. The OHT travels along ceiling-mounted tracks, gripping and conveying FOUPs through overhead pathways. This setup not only maximizes spatial efficiency by utilizing vertical space, but also offers significantly higher transport efficiency and reduced handling time compared to traditional manual operations.
The system can be deployed in cleanroom environments with ceiling heights as low as 2.7 meters, without occupying personnel walkways—making it ideal for facilities with limited vertical clearance. The OHT can directly access stocker load ports without being obstructed by equipment or personnel along the route, ensuring uninterrupted and automated material transfer.

 

Ceiling-Suspended OHT System: Enabling Direct Transport and Reducing Production Cycle Time
The Overhead Hoist Transport (OHT) system is a ceiling-suspended automated conveyance solution that utilizes vertical space above process equipment. Based on specific customer requirements, it enables seamless transfer of FOUPs across various process zones or even between buildings.
By eliminating the need for stockers as intermediate storage points, Mirle’s factory-wide OHT solution supports direct EQ-to-EQ transfers, significantly reducing both carrier travel time and the overall production cycle time.
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2022.12.07

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